Structure and Characterization of TiC/GLC Multilayered Films with Various Bilayers Periods

The spontaneously self-organizing multilayered graphite-like carbon (denoted as GLC) /TiC films with various bilayer periods in the range of 13.3–17.5 nm were deposited on silicon and 1Cr18Mn8Ni5N stainless steel substrates using closed field magnetron sputtering deposition facility. microstructures chemical compositions prepared characterized by scanning electron microscopy, high resolution transmission X-ray diffraction photoelectron spectroscopy respectively. structures all consisted titanium carbide layers sp2-rich periodically alternate arrangement. TiC contents can be controlled means adjusting current graphite target. Furthermore, mechanical tribological performances appraised nano-indentor, scratch measures, ball-on-plate tribometer results indicated that multilayer structure endowed as-deposited TiC/GLC outstanding properties, especially film 15.9 period at 10 A showed excellent adhesion strength hardness; Simultaneously it also exhibited lowest average friction coefficient humid environment owing to its content sp2 hybrid carbon.